Other Semiconductor Materials

Thinning of Sapphire Wafers
With the increasing application of sapphire substrates in advanced packaging, higher demands are placed on substrate surface quality, total thickness variation (TTV), and warp, which in turn drives higher requirements for thinning wheels.
Thinning of Sapphire Wafers

Application Scenarios


With the increasing application of sapphire substrates in advanced packaging, higher demands are placed on substrate surface quality, total thickness variation (TTV), and warp, which in turn drives higher requirements for thinning wheels.


  • 1.High sharpness for superior removal efficiency

  • 2.Good bond toughness ensures low impact, low stress,and low subsurface damage

  • 3.Optimized porosity provides appropriate friction toavoid slipping

  • 4.Excellent self-sharpening - no passivation or clog-ging - resulting in a clean, scratch free surface


Model Specifications



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6A2T


Model

DTHXWBondGrit Size

6A2T

209

254

313

30

95

155

158

237

5

7

2

3

4.5

4

B

ML

325

2000


Workpiece

Sapphire Wafer

Workpiece Size

4-Inch

Wheel Specification

6A2T D313 (12 Inch) B 325

G-Ratio(Wheel wear :

Workoiece removal)

1:5

Surface Quality

Smooth surface with no deep lines

Roughness

≤300nm

TTV

≤2μm