Silicon Wafer

Double-Sided Thinning of Silicon Wafers
The double-sided thinning of wheels for semiconductor silicon wafers is specially designed for the precise double-sided grinding of wafers, with high flatness, low damage, low contamination, long service life, and stable grinding performance. It is used to achieve high-precision thickness control, parallelism control, and low-dam-age surface processing of silicon wafers.
Double-Sided Thinning of Silicon Wafers

Application Scenarios


The double-sided thinning of wheels for semiconductor silicon wafers is specially designed for the precise double-sided grinding of wafers, with high flatness, low damage, low contamination, long service life, and stable grinding performance. It is used to achieve high-precision thickness control, parallelism control, and low-dam-age surface processing of silicon wafers.


  • 1. Ultra high thickness uniformity & flatness

  • 2. Low subsurface damage

  • 3.Zero metallic contamination

  • 4.Excellent self sharpening & stable grinding force

  • 5.Good cooling & chip evacuation

  • 6.Low wear, long service life


Model Specifications




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6A2C


Model

DTHXWBondGrit Size

6A2C

160258055V3000


Workpiece

Silicon Wafer (Double-sided removal respectively :42.5um)

Workpiece Size

12 inch

Wheel Specification

6A2C D160 V 3000

G-Ratio(Wheel wear :

 Workoiece removal)

1:28

Roughness

The surface is uniform without deep lines

TTV

≤0.5μm

Warp

≤10μm

Bowl

≤2μm